Process Mining Applied to the Test Process of Wafer Scanners in ASML

Rozinat, A.; de Jong, I. S. M.; G√ľnther, C. W.; van der Aalst, Wil M. P.

(2009)
Journal Article

In: IEEE transactions on systems, man, and cybernetics / C
Volume: 39
Issue: 4
Page(s)/Article-Nr.: 474-479

Identifier