Process Mining Applied to the Test Process of Wafer Scanners in ASML

Rozinat, A.; de Jong, I. S. M.; Günther, C. W.; van der Aalst, Wil M. P.

Journal Article

In: IEEE transactions on systems, man, and cybernetics / C
Volume: 39
Issue: 4
Page(s)/Article-Nr.: 474-479


  • Department of Computer Science [120000]
  • Chair of Computer Science 9 (Process and Data Science) [122510]